The rae configuration is shown in the figure above. For purposes of ellipsometry, it is adequate to discuss the wavess electric field behavior in space and time, also known as polarization. As for your specific problem, please be assured that regress pro is able to treat ellipsometer data from many common configurations. It is a fast instrument for thin film measurements giving tiltfree, focusfree, automatic 2d3d color thickness and index images of the sample surface. In the release package there is an examples directory with. Gaertner scientific corporation ellipsometers software. All authorized users are expected to read and understand this sop and follow the operation instructions carefully. Gaertner ellipsometer model l116c operation instructions make sure you signed up for time on the online schedule for this instrument before using it. The gaertner l119 ellipsometer and its use in the measurement of thin films 5. Generally, 0 gaertner scientific l117 is a manual ellipsometer for the measurement of surface film thickness and refractive index. Program film, the normal selection, has default values of. Ellipsometry is a nondestructive and contactless method for determining the thickness and refractive index of thin films.
The most common polarization is elliptical, one that combines orthogonal waves of arbitrary amplitude and phase figure 1c. It combines the best features of previous instruments with innovative new technology. The gaertner scientific lsews stokes waferskan ellipsometer is a high speed film thickness mapping system measuring one site per second including stage travel it uses advanced stokesmeter technology to give tiltfree, focus free, 2d3d color thickness and index images on any size wafer up to 300mm. The ellipsometer we used was a stokes ellipsometer lse gaertner scientific. A disadvantage of this technique is the calculated film thickness leads to multiple solutions, so before measurement you need to know the thickness range within 2800 a for sio2. The stokes ellipsometer lseusb with convenient usb interface.
Using our proven technology, the ise enables users to optimize optical properties of deposited films, control film growth with subangstrom sensitivity, and monitor growth kinetics. An introduction to the study of ellipsometry is presented, with special attention given to the gaertner model l119 ellipsometer and the techniques of measuring thin films with this instrument. The film thickness in this study ranges from about 100 a to well above a. Ellipsometry normally requires some computer power to get results and therefore, the technique has only recently become widely used, although it has been known and used since paul drude proposed it over 115 years ago. The last three chapters 10, 11, and 12, deal with emerging areas in ellipsometry. To view our complete stock of used ellipsometers visit our ellipsometers category. Gaertner modeling program works very closely to this as well. Lgemp windows software is versatile and can measure single layer films such as oxides, nitrides and photoresists as well the top layer on a known 1, 2, or 3 layer stack such as poly on oxide and oxide on poly on oxide. This gives stokes ellipsometers the unique ability to instantly separate the polarized from the unpolarized components of the measuring beam thereby delivering a highly accurate measurement of film thickness and index based.
Gaertner l117 null ellipsometer texas state university. Gaertner stokes ellipsometers do this naturally as our stokesmetera polarimeter is used as the ellipsometer analyzer. Delta, the phase difference, need to be determined. Marshall space flight center marshall space flight center, alabama 35812 to. Extremely precise and stable the model lseusb stokes ellipsometer is an excellent value in a basic uncomplicated ellipsometer. The polarizer allows light of a preferred electric field. Imaging 300mm stokes waferskan ellipsometer the l115s300 stokes waferskan ellipsometer s high speed film thickness mapping system, based on advanced stokesmeter technology, measures 49 sites in 49 seconds. Ellipsometry is an optical technique for investigating the dielectric properties of thin films. Typical manufacturers include gaertner, horiba and rudolph technologies. Answers provided by this service may not be relevant to the materials presented. Ellipsometry measures the change of polarization upon reflection or transmission and compares it to a model. In addition to this gaertner l116b, capovani brothers inc stocks a wide range of used and refurbished ellipsometers.
The ise is a new insitu spectroscopic ellipsometer developed for realtime monitoring of thin film processing. Sep 22, 2016 ellipsometer gaertner l115s 4030jerome. Gaertner ellipsometer user instructions for the micro. Feb 07, 20 bid service, llc video demo\walkaround gaertner l117 ellipsometer. All users must wear appropriate personal protective equipment. Gaertner scientific corporation ellipsometers stokes. Gaertner scientific lsews stokes waferskan ellipsometer. Precision of measurement is further enhanced by the use of gaeetner stable, spectrally precise, high signal to noise hene laser light source. Ne laser for measurement of film thickness and refractive index. The gaerthner scientific corporation l117 is a single wavelength, variable angle, manual, null ellipsometer using 632. A sample ellipsometry measurement is shown in figure 6. It combines high accuracy and precision with a wide spectral range 193 to 2500nm.
University of mn, minnesota nano center standard operating. Gaertner scientific l117 manual null ellipsometer w. Distribution statement unclassified unlimited 2 19. If it falls below 25, use the gain control to bring the meter indicator reading up to 100. Gaertner l116s300 stokes ellipsometer standard operating procedure version. The lgemp can be used with a manual nulling ellipsometer such as the model l117, and it. The units simple robust design offers unprecedented ease of use and instantaneous measurement. The reflected light has undergone amplitude and phase changes for both p and s polarized light, and ellipsometry measures their changes. A gaertner l117 production ellipsometer with a helium neon.
A disadvantage of this technique is the calculated film thickness leads to multiple solutions, so before measurement you need to know the thickness range within. The instrument relies on the fact that the reflection at a dielectric interface depends on the polarization of the light while the transmission of light through a transparent layer changes the phase of the incoming wave depending on the refractive index of the. It interfaces to your windows pc or laptop with a usb 2. It can be used to characterize composition, roughness, thickness depth, crystalline. A complete alignment of an ellipsometer consists of the alignment of the. Archer, manual of ellipsometry gaertner scientific. Calibrating an ellipsometer using xray reflectivity. Over the years, they developed toolmakers microscope, precision slides and the polarizing spectrometer ellipsometer. Ellipsometer gaertner scientific corporation began in 1896 and now situated at illinois usa. The incident light is linear with both p and s components. The electric field of a wave is always orthogonal to the propagation direction. Ellipsometer uses ellipsometry technique to measure film thickness and their optical properties like index of refraction, extinction coefficients, absorption and many more. Measurements can witness the sample before, during and after. Ellipsometry ellipsometry and reflectometry definitions reflectance delta, the phase difference induced by the reflection if.
Release the locator pin, and move the arm slowly up or down until the pin seats in the detent on the vertical plate. Start the gemp gartner ellipsometer measurement program program on the computer. High precision alignment procedure for an ellipsometer citeseerx. It does not use computer, all determinations are from tables and graphs. Gallium arsenide surface film evaluation by ellipsometry and its. Barack obama quoted scripture, dancing around maypoles, because that isnt right. S series ellipsometers comply with european safety directives and carry the ce mark. The rc2 is a nearuniversal solution for the diverse. Light can be described as an electromagnetic wave traveling through space. Definitions and conventions in ellipsometry sciencedirect.
Pdf an introduction to modeling in spectroscopic ellipsometry. Ellipsometry is an optical technique for investigating the dielectric properties complex refractive index or dielectric function of thin films. The angle of incidence is controlled by a manual goniometer which has a. Calibrating an ellipsometer using xray reflectivity the advanced. Bid service, llc video demo\walkaround gaertner l117 ellipsometer. From thin gate oxides only tens of angstroms thick to thick polyimides and photoresists gaertner has earned a reputation for providing precise, reliable results. A read is counted each time someone views a publication summary such as the title, abstract, and list of authors, clicks on a figure, or views or downloads the fulltext. Cushman and others published an introduction to modeling in spectroscopic ellipsometry, focusing on models. Oct 11, 2016 the ellipsometer gaertner scientific corp.
As the value of fj increases both values of the refractive index and ex tinction coefficient increases. Gaertner scientific has helped pioneer this exciting field since the late 30s when we constructed our first polarizing spectrometer. A preowned ellipsometer available at a substantially lower price is a good option for a company or university on a limited budget. Fundamentals and applications of spectroscopic ellipsometry. It is a single wavelength ellipsometer with software for data acquisition and can measure the optical. If the meter reading can no longer be lowered by rotating the analyzer or. If the orthogonal waves are 90 outofphase and equal in amplitude, the resultant light is circularly polarized figure 1b. The lseusb model ellipsometer ships complete with lgemp windows software, usb cable, 6 inch sample stage and reference wafer. The ellipsometer introduction an ellipsometer enables to measure the refractive index and the thickness of semitransparent thin films. A light source produces unpolarized light which is then sent through a polarizer. Ellipsometers give noncontact thickness and refractive index measurements of thin transparent and semi transparent films to. Turn the power onoff keyswitch until the power light on the front illuminates.
Completeease is the perfect interface for realtime data acquisition, monitoring and control. High speed film thickness measuring system measures in less than a second. The units simple robust design offers unprecedented ease of. Spectroscopic ellipsometers designed and built by angstrom sun technologies inc are advanced but also affordable.
Manual on ellipsometry, gaertner scientific corp 1968. Gaertner scientific corporation ellipsometers introduction. Values obtained from the ellipsometer are analyzed by a computer program for a determination of optical constants and thickness of the film. The model l115s300 builds on the production proven gaertner waferskan line of ellipsometers in widespread use throughout the world. Tompkins ellipsometry ellipsometry and reflectometry definitions reflectance delta, the phase difference induced by the reflection if. The ellipsometer analyzes the effect of reflection on the polarization of light directed upon the surface of materials, to acquire measurement data identifying properties critical to quality control. This ellipsometer is used for measuring thickness and refractive index of transparent films, especially on a silicon substrate. Pdf calibrating an ellipsometer using xray reflectivity. University of mn, minnesota nano center standard operating procedure 1 equipment name. The light source is a 150w xenon arc lamp which is used with a. Common ellipsometer configurations include rotating analyzer rae, rotating polarizer rpe, rotating compensator rce, and phase modulation pme. Gaertners ellipsometer staff tool view photo gallery. Description ellipsometry is a nondestructive method of measuring the index of refraction and film.
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